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Modelling of Microfabrication Systems formatIsbn:Hardcover - 9783540002529 dem Milchmann

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Modelling of Microfabrication Systems formatIsbn:Hardcover - 9783540002529 dem MilchmannThis is the first book to address modelling of systems that are important to the fabrication of three dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x ray lithography.

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